Navakanta Bhat
Professor and Chair, CeNSE

Program Coordinators
Sanjeev Shrivastava

Training Coordinator
Akshay Naik

Program Advisor
S. A. Shivashankar

Local Organizing Committee

  • Savitha P
  • Suresha S J
  • Siva P
  • Varadharaja P
  • Suma B N
  • R N Narahari
  • Aravinda BN
  • Sumegha Nadakarni
  • Somashekar P S
  • Narmdeshwar Pandey
  • Sangeetha G
  • Shayistha Mohamedi Begum
  • Manjunatha N S

Contact us:
Course Coordinator:
Dr. Sanjeev Kumar Shrivastava
CeNSE, IISc, Bengaluru-560012
Tel: 080-23603281, 23600209
Email: sanjeevs@iisc.ac.in

Introductory Training Course in Nanofabrication Technologies

Feb 04 - 24, 2020



Over the past few years, India’s role in promoting and assisting development in the neighbouring countries has increased substantially. Beginning with his swearing in, Prime Minister Narendra Modi has repeatedly emphasised the need for close collaboration among countries in the neighbourhood. One of the areas that needs significant strengthening of ties among countries in our neighbourhood is science and technology. Inadequate availability of essentials like safe drinking water, public health facilities, and energy are some of the problems that are common to all neighbouring countries. Closer interaction in these domains will not only foster exchange of ideas and promote active research in these areas but would also strengthen people-to-people bond.

In this regard, through financial sponsorship by the Development Partnership Administration-II Division under Indian Technical & Economic Cooperation Programme (ITEC), of Ministry of External Affairs, and in consultation with the Ministry of Electronics and Information Technologies (MeitY), Govt. of India, we are holding the 3rd Special Training Course in Nanofabrication Technologies for ITEC countries at the Centre for Nano science and Engineering, Indian Institute of Science. CeNSE was dedicated to the nation by the Prime Minister in the month of Feb 2015 and was established with support from MeitY to promote research and education in nano science and engineering. The Centre would like to help foster greater interaction among neighbouring countries through the special course being conducted (which may later become a Regular Program) in the very important contemporary field of nano science and technology, by providing training and access to its facilities.

The objective of this special course will be to train scientists on both the theoretical and practical aspects of nano-fabrication technologies, “starting from the cleaning of wafers to the packaging of devices". The reach of this course will likely be extended to a large number of institutions and participants through a variety of new and expanded initiatives, viz., training at different levels in Nanoelectronics to scientists from institutions in ITEC countries. The training program will be as follows:

(1) Lecture on various aspects of nanoscience and technology followed by poster session on one of the first two days:
A series of lectures on "Thin film technology", "Lithography techniques", "Photovoltaics", "CMOS integration", "Photonics", "Laser technology", "III-nitrides: materials and devices", "Microelectromechanical (MEMS) sensors", "Technology of MEMS devices", "Application of MEMS devices", "Microfluidics for biological applications", and "Nanopropellers for medicine".

(2) Practical training on processes used in fabrication of electronics devices: Synthesis/fabrication of nanomaterials/devices and their characterization

2a. Preparation and Characterisation of Nanostructured ZnO
ZnO is a large-band-gap semiconductor, which is also a piezoelectric. As such ZnO has been studied a variety of applications. This module is designed to provide participants with first-hand experience in the preparation of nanostructured ZnO through microwave irradiation of a solution of a suitable zinc compound. The method is suitable not only for the preparation of nanocrystalline (powder) ZnO, but also ZnO coatings on substrates such as silicon. Both the powder material and the coating so prepared will be characterized by XRD, SEM, FTIR, and Raman analysis.

2b. Fabrication of a silicon solar cell
The module is designed to expose the participants to various aspects of solar cell fabrication and characterisation. More specifically, the participants would perform the following fabrication steps: Selection of silicon wafer, RCA cleaning, pyrogenic/wet oxidation, photolithography (dehydration, photoresist coating, aligning and UV exposing, developing), oxide etching using reactive ion etching, deposition and diffusion, contact lithography, front metallisation (sputtering or electron beam evaporation), lift-off, lithography (front side pattern protection), oxide etching on the back side, backside metallization (sputtering or electron beam evaporation), forming gas annealing. The solar cell devices are then characterised to evaluate their efficiency using an electrical probe station and a solar simulator.

2c. Fabrication of a MEMS cantilever
The module is designed to train the participants in fabricating and characterising a MEMS cantilever for various applications. More specifically, the participants would perform the following fabrication steps: selection of silicon wafer, RCA cleaning, pyrogenic/wet oxidation, photolithography (dehydration, photoresist coating, aligning and UV exposing, developing), oxide etching - wet etching, and cantilever device release using reactive ion etching. Once the device is fabricated, the participants would trained in the characterisation of the cantilever devices using scanning electron microscopy and laser Doppler vibrometry.

Program Schedule
Group Photo after Inauguration of Program